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Composition control of functional-gradient coatings in conversion areas

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Product Description

The necessity of development of new methods of forming of two- and three-dimensional functional-gradient coatings is shown. A conclusion about perspective of the use for the decision of standing task of plants on the basis of the inversion magnetron sputtering system with a gas anode, partitioned cathode units and axial plasma flows is done. Are presented and analyzed the results of computation-analytical experiment on the effect of degree of sectioning of cathode-target unit of the explored sputtering system on possibility of management by composition of the deposited coatings in various points on the surface of substrate. Recommendations on the choice of location of partitioned cathode units in discharge interval are given.

Additional Information

Authors

Гарин В.О., Колесник В.П., Литовченко Л.В., Слюсарь Д.В., Степанушкин Н.П.

Year of publication

2015

6

Volume

123

Language

Russian

Types of files

pdf

Section

Ion Plasma Technologies and Equipment

Quality

excellent

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