The influence of ion implantation of metals W+ and Mo+ in titanium alloys VT-6 on the phase composition of the surface layers. The broadening of the line α-Ti (101) indicates a trend of increasing deformation of the crystal lattice of α-Ti in the implantation of heavy ions W +and Mo +. The temperature dependence of ion distribution profiles Mo+ and W+ in the titanium alloy VT-6 during implantation dose 5 × 10 17см–2 with an energy of 60 keV. After annealing at 823 K the main changes associated with the phase Al3Ti. The diffraction patterns observed an isolated peak (111) Al3Ti.