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Structure and mechanical properties of ZrN coatings formed by deposition of vacuum arc plasma fluxes

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Product Description

ZrN coatings received by deposition of vacuum arc plasma fluxes are investigated. Results of researches of influence of nitrogen pressure and substrate potential for coatings deposition rate, their mechanical properties, and also on structure and phase structure are given. In pressures area of 0,2— 6,65 Pa are observed substantial increase of coatings deposition rate, conditioned braking of electronic component of plasma at collisions with the molecules of nitrogen. Coatings possess the high values of nanohardness (≈30 GPa) and Young’s modulus (≈400 GPa). At the increase of nitrogen pressure the diphasic state in coatings will be realized — along with cube stoichiometrical ZrN (or even superstoichiometrical composition) X-ray amorphous zirconium nitride which composition Zr3N4 is added is present in coating.

Additional Information

Quality

excellent

Volume

12

1

Section

Ion Plasma Technologies and Equipment

Types of files

pdf

Year of publication

2014

Pages

45-56

Language

Russian

Authors

Белоус В.А., Василенко Р.Л., Колодий И.В., Куприн А.С., Леонов С.А., Тихоновский М.А., Толмачёва Г.Н., Хороших В.М.

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