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Steady-state regimes of low-pressure magnetron discharge

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Product Description

The experimental research of stationary regimes and extinction thresholds of magnetron discharge with controlled size and topology of the magnetic field lines has been carried out. An explanation of the obtained results basing on the space-averaged model of gas discharge with spatial ionization adapted for magnetron discharge is presented.

Additional Information

Quality

excellent

Volume

13

2

Section

Plasma Physics

Types of files

pdf

Year of publication

2015

Pages

264-275

Language

Russian

Authors

Дудин С.В., Зыков А.В., Яковин С.Д.

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