In operation with various ion- vacuum installations there is a necessity of dosing gas inlet in working chambers. One of the most simple and reliable devices serving for these purposes -is two-channel system of gas inlet SNA- 2.
In the devices having a feedback, it allows:
- To automatically support the set pressure;
- To choose polarity of a signal of a feedback and to shift its phase on 180oС;
- To change time constant of the amplifier of a feedback.
For unlocking the valve in system it is applied piezostriction device providing remote control for inlet valve, work in modes “yes” and “no” as well as modulation of a gas stream.
Presence of two valves enables to carry out both serial and simultaneous inlet of two gases.
The dosing pair of inlet valve: stainless steel – oxygen-free copper .
|Range of working pressure, Ра||2,66×10 -6 13,3|
|Gas flow at completely opened inlet valve, m×103×Pa/s, not less than||7×10 -2|
|Power supply: a network of an alternating current|
|Power consumption, Wt A, not more than||100|
|Overall dimensions, mm:|
|Power supply unit||450×450×200|
|Weight, kg, not more than||24|