Gas inlet two-channel sytem INJECT

Product Description

The device is intended for remote control of gas inlet in ion – vacuum installations.

In operation with various ion- vacuum installations there is a necessity of dosing gas inlet in working chambers. One of the most simple and reliable devices serving for these purposes is two-channel system of gas inlet INJECT.

In the devices having a feedback, it allows:

  • To automatically support the set pressure;
  • To choose polarity of a signal of a feedback and to shift its phase on 180oС;
  • To change time constant of the amplifier of a feedback.

For unlocking the valve in system it is applied piezostriction device providing remote control for inlet valve, work in modes “yes” and “no” as well as modulation of a gas stream.

Presence of two valves enables to carry out both serial and simultaneous inlet of two gases.

The dosing pair of inlet valve: stainless steel – oxygen-free copper .

CHARACTERISTICS

Range of working pressure, Ра 2,66×10 -6 13,3
Gas flow at completely opened inlet valve, m×103×Pa/s, not less than 7×10 -2
Power supply: a network of an alternating current
Voltage, V 220
Frequency, Hz 50
Power consumption, Wt A, not more than 100
Overall dimensions, mm:
Power supply unit 250×230×140
Inlet valve 350×100×100
Weight, kg, not more than 6

Additional Information

Number of channels of a working gas

2

Supply Voltage, V

220

Frequency of a current, Hz

50

Input Phase

1

Weight, kg

6

Maximum Electrical power consumption, W

40

ННП “УКРРОСПРИБОР”

ОАО «Selmi»

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