Coatings based on the systems (Ti-Al-Zr-Nb-Y)N was deposited by sputtering of multicomponent
cathode using vacuum arc method. Investigation of the depth distribution of elements and impurities
was carried out by energy dispersive X-ray spectroscopy. Certain inhomogeneity of the depth
distribution of the elements has been found within the coating along with the presence of impurities
caused by the method and conditions of deposition as well as the structure of the cathode.