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Depth distribution of elements in multicomponent coatings based on the system (Ti-Al-Zr-Nb-Y)N

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Product Description

Coatings based on the systems (Ti-Al-Zr-Nb-Y)N was deposited by sputtering of multicomponent
cathode using vacuum arc method. Investigation of the depth distribution of elements and impurities
was carried out by energy dispersive X-ray spectroscopy. Certain inhomogeneity of the depth
distribution of the elements has been found within the coating along with the presence of impurities
caused by the method and conditions of deposition as well as the structure of the cathode.

Additional Information

Quality

excellent

Volume

12

1

Section

Ion Plasma Technologies and Equipment

Types of files

pdf

Year of publication

2014

Pages

556-563

Language

Russian

Authors

Турбин П.В.

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