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Application of 4He2+ and 3He2+ beams of the compact accelerator “Sokol” for ion beam analysis

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Product Description

Some planar structures have been studied by 4Не2+ ion beam and the backscattering spectrometry. Thicknesses of separate layers were determined in the optical coating consist of 13 alternated Ta2O5 and SiO2 layers on the SiO2 substrate. Oxygen fraction was measured in VN coating formed by ion beam assisted deposition technique (IBAD) and in Nb2O5 coating deposited by laser sputtering. Besides deuterium concentration distribution in titanium deuteride layer on Mo substrate was measured by 3Не2+ ion beam and the D(3He,p)4He nuclear reaction.

Additional Information

Section

Ion Plasma Technologies and Equipment

Volume

2

2

Types of files

pdf

Language

Russian

Year of publication

2015

Pages

90-98

Authors

Bondarenko V.N., Glazunov L.S., Goncharov A.V., Karpus S.G., Kuz’menko V.V., Pistryak V.M., Sukhostavets V.I., Zats A.V.

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