Improvement of functional characteristics of plasma filters for multicomponent film deposition

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Product Description

Macroparticle Tracer (MPT) software was developed for rapid modeling of macroparticle flows in plasma guide channels of vacuum-arc plasma source filters. Simulation results, which were obtained using MPT allow one to analyze behaviour of the particle flows in their interaction with baffle traps of different geometry. It is vital in order to develop new filtering systems and optimize existing ones.
Based on the found laws, the baffle system combining high plasma filtering degree and design simplicity was developed. Such baffle system was manufactured and installed inside T-shaped filter of vacuum arc apparatus for multicomponent coatings deposition. Method of measuring of ion current value and distribution across the plasma flow by using of multichannel probe and software for its operation was developed. The software is capable of reading data from the probe and visualize it in real-time mpde. Possibility to optimize Transporting properties of vacuum arc systems was shown on an example of the T-filter. Probe measurement allowed one to find the conditions, which make it possible to obtain coatings with uniform distribution of its components and thickness over condensation area.
Technique of coating composition adjustment was proposed and tested. It is based on simultaneous unbalancing of arc current and magnetic field strength symmetries. It was shown that the range of available aluminum concentration of TiAlN coatings can be widened in three times.

Additional Information

Authors

Аксёнов Д.С.

Year of publication

2016

Pages

161

Language

Russian

Types of files

pdf

Section

Ion Plasma Technologies and Equipment

Quality

excellent

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