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Features condensation of microparticles of vacuum arc on phase of ion cleaning

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Product Description

Presents the results of the study of condensation macroparticles of vacuum arc during ion cleaning of the sample surface. The Weber numbers was evaluated for titanium macroparticles of various shapes: macroparticles retain the spherical shape at a value of the Weber number We <0,03, have flattened-shape when 0,06

Additional Information

Authors

Сысоев Ю.А.

Year of publication

2014

3

Volume

110

Language

Russian

Types of files

pdf

Section

Ion Plasma Technologies and Equipment

Quality

excellent

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