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Ion-beam mixing in Mo-Si x-ray multilayer mirror

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Product Description

The structural changes in Mo/Si multilayers are investigated at an irradiation by helium ions. It is shown that the irradiation results in reduction of the period of the mirror. The reduction of the period is accompanied by reduction of thickness of molyb-denum and silicon layers, increase of thickness of the hashed zones and reduction of their density. Such change of structure results in deterioration x-ray optical properties of the x-ray mirror.

Additional Information

Authors

Воронов Д.Л., Зубарев Е.Н., Кондратенко В.В., Пеньков А.В., Перегон Т.И., Тищенко Л.П.

Language

Russian

Types of files

pdf

Quality

excellent

Time of event

22-27 апреля 2002 г.

Сonference Title

14-ый Международный симпозиум Тонкие пленки в оптике и электронике

Conference Venue

Ukraine Kharkiv

Conference section

Раздел II Термодинамика образования, фазовые диаграммы

Section

Ion Plasma Technologies and Equipment

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